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Pump Speed Information

The pumping speed of capture technology vacuum pumps is measured according to ISO/DIS 3556-1-1992.

Key points to note in this specification include:

  • The ion pump is required to be fully saturated after pressure stabilization.
  • There is no method provided for testing ion pumps in an unsaturated state.
  • This method does not allow for testing of ion pumps below 10 l/s.
  • This test method specifically calls for the use of nitrogen and is subject to interpretation for other gases.

ISO/DIS 3556-1.2 (pdf)

For additional information on speed testing of ion pumps, please contact us directly.


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